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Investigation of Plasma Parameters and Active Species Concentration in Rf-Excited Low Temperature Plasmas

Thesis Info

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Author

Khan, Abdul Waheed

Program

PhD

Institute

Gomal University

City

Dera Ismail Khan

Province

KPK

Country

Pakistan

Thesis Completing Year

2018

Thesis Completion Status

Completed

Subject

Plasma Physics

Language

English

Link

http://prr.hec.gov.pk/jspui/bitstream/123456789/12280/1/Abdul%20Waheed%20Khan%202019%20plasma%20physics%20gomal%20prr.pdf

Added

2021-02-17 19:49:13

Modified

2024-03-24 20:25:49

ARI ID

1676726507141

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Radio frequency (RF) driven inductively coupled plasma (ICP) discharges are extensively used in a variety of industrial and technological applications due to their multiple advantages like low sheath voltages, high plasma densities, low contamination from reactor sputtering, and easily controllable ion energies. In comparison to the conventional ICPs, the Magnetic Pole Enhanced-Inductively Coupled Plasma (MaPE-ICP) scheme is a relatively new concept that offers additional attractive features such as lower electron temperature, higher plasma density, better spatial uniformity and larger area coverage capability. Therefore, the MaPE-ICP source is chosen in the present study to investigate the plasma parameters of interest in relevance to their applications. In analogy to the conventional ICPs, the MaPE-ICP also operates in two distinct modes, namely electrostatic or E-mode and electromagnetic or H-mode. These two modes exhibit significant differences in their electrical and plasma properties, and thus have motivated many researchers to study the two modes of conventional ICPs over the last two decades. However, very little work has been done in the two modes of the MaPE-ICP discharges. Therefore, the key plasma parameters and active species concentration are investigated here in the two distinct modes of the MaPE-ICP to understand the related phenomena in this modified version of ICP. In the first step, a comparative study of the electron temperature determined by Langmuir probe and the excitation temperature estimated by Optical Emission Spectroscopy (OES) is carried out in the two distinct modes of the MaPE-ICP using argon as operating gas for different applied RF powers (5-50 W) with the varying gas pressures (15-60 mTorr). The non-intrusive OES based measurements of plasma parameters like the electron temperature is very proficient for plasma processing where the application of Langmuir probe measurements has several limitations. In this study, an effort is made to find a relationship between the measured values of the electron and excitation temperatures. It is observed that the electron temperature can be easily determined from the excitation temperature in the H-mode but difficult to do so in the E-mode of the MaPE-ICP. The gases used in processing of materials and other applications are mostly electronegative in nature. Oxygen is a simple electronegative gas which is also used in various applications such as photo-resist ashing, oxidation, sterilization, and surface activation and modification. Therefore, in the second step, the study is extended to determine plasma parameters and active species concentration in the two distinct modes of the MaPE-ICP operated in oxygen for different applied RF powers (40-300 W) and gas pressures (15-60 mTorr). The key plasma parameters like electron density, electron temperature, electron energy probability function, positive and negative ions densities are determined by using Langmuir probe. Moreover, the atomic oxygen density and dissociation fraction are estimated with the help of OES. The measured parameters are compared with the reported parameters in the conventional ICPs and some interesting similarities and differences are found between the two schemes. It is observed that the MaPE-ICP presents relatively early mode transition, lower electron temperature, and much higher dissociation fraction and atomic oxygen density. These features suggest that the MaPE-ICP will be more promising for the purpose of plasma processing applications. The work will be a useful addition to the field of related studies and also for using other gases of technological interests.
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جرمِ ضعیفی کی سزا مرگِ مفاجات

جرم ضعیفی کی سزا مرگ مفاجات
نحمدہ ونصلی علی رسولہ الکریم امّا بعد فاعوذ بااللہ من الشیطن الرجیم
بسم اللہ الرحمن الرحیم
معزز اسا تذہ کرام اور میرے ہم مکتب شاہینو!
آج مجھے جس موضوع پر اظہار خیال کرنا ہے وہ ہے:’’جرم ضعیفی کی سزا مرگ مفاجات ‘‘
صدرِذی وقار!
انسان کو اللہ تعالیٰ نے اشرف المخلوقات پیدا فرمایا ہے، اس کے سر پرعظمت کا تاج سجایا ہے، اس کو مسجودِد ملائکہ بنایا ہے، خلافت کی عظیم ذمہ داری اسے سونپی ہے، اس کے دم قدم سے باغِ عالم میں بہار ہے، اسی کے سامنے جملہ مخلوقات سرتسلیم خم ہے، خونخوار درندے اور وحشی جانور اس کی تابع فرمانی میں مصروف ہیں۔
جنابِِ صدر!
اگر انسان اپنی تخلیق کے مقصد سے آگاہ رہے، اپنے وجود کو اسی مقصد کے لیے مستعد اور تیار رکھے، اپنے اعضائے جسمانی میں مقصد کی تکمیل کے لیے تحریک پیدا کرتے رہے، قویٰ کومضمحل نہ ہونے دے، فکری اور شعوری قویٰ کو استعمال میں لاتا رہے، زندگی میں کسی لمحہ بھی افراط وتفریط کا شکار نہ ہو۔۔ تو
صدرِذی وقار!
اس کے تصورات و خیالات کو پاکیزگی مل سکتی ہے، اس کی تقریر اور وعظ میں تاثیر پیدا ہو سکتی ہے، اس کے سپر د کی گئی خلافت کی ذمہ داری میں نکھار پیدا ہو سکتا ہے، اس کے مقصد ِحیات کی تکمیل ہو سکتی ہے، اس کے خوابوں کو شرمندہ تعبیر کیا جا سکتا ہے، اس کے خیالات میں طہارت کے جلوے دیکھے جا سکتے ہیں۔
جنابِ صدر!
زندگی مقصد حیات کے حصول کے لیے کدوکاوش کا نام ہے ، زندگی دوسروں کو زندگی کی خوشیاں بہم پہنچانے کا نام ہے ، زندگی محض حرکت کا نام نہیں ہے ، زندگی بڑوں کی عزت اور چھوٹوں پر شفقت کا نام ہے، زندگی سونے ، آرام کرنے اور خو ردونوش کا...

The Effectiveness of Applying the Jigsaw Model in Learning Indonesian Exposition Texts for Class Viii State Junior High School 4 Sendana, Majene Regency

This study aims to describe the effectiveness of the application of the jigsaw model in learning to write Indonesian exposition texts for class VIII SMP Negeri 4 Sendana in Majene. The type of research used is a quasi-experimental type experiment with two groups, namely the control group and the experimental group who were given a pretest and posttest. These two groups aim to prove whether the jigsaw learning model is effectively used or not in class VIII of SMP Negeri 4 Sendana. Before implementing Jigsaw Model, the results of the study suggest less successful, as shown by the 17 pupils who can only answer the questions that have been presented. As demonstrated by 51 students who were able to answer questions, the outcomes of studying exposition texts using the jigsaw learning approach in class VIII were successful.

Comparative Effectiveness of Expository Strategy and Problem Solving Approach of Teaching Mathematics at Secondary Level

A sound education in mathematics is important for any modern knowledge based economy. Mathematics is now important in many areas where it has not previously played much of role, for example, in biology, social sciences etc. If the proper mathematical foundations are not laid during the formative years of childhood and adolescence, it becomes increasingly difficult to address this weakness in later life. The attempts to confront these shortcomings during retraining in later life are generally wasteful and only partly successful. The present study was designed to investigate the comparative effectiveness of problem-solving approach on the academic achievement of secondary school students in mathematics. The major objectives of the study were: (1) To determine whether the problem solving approach is more effective than expository strategy of teaching on academic achievement of students in mathematics. (2) To determine whether the problem solving approach is more effective than expository strategy of teaching on attitude of students in mathematics. (3) To examine the effect of problem-solving approach on the academic achievement of low achievers. (4) To measure the effect of problem-solving approach on the academic achievement of high achievers. (5) To find out the effect of problem-solving approach on the retention of students in mathematics. To achieve the objectives of study, following null hypotheses were tested: (1) There is no significant difference between the pre-test mean achievement scores of experimental and control group. (2) There is no significant difference between the pre-test mean achievement scores of low achievers of experimental group and control group. (3) There is no significant difference between the Pre-test mean achievement scores of high achievers of experimental and control group. (4) There is no significant difference between pre-test mean attitude scores of experimental group and control group. (5) There is no significant difference between the post-test mean achievement scores of experimental group and control group. (6) There is no significant difference between post-test mean achievement scores of low achievers of experimental group and control group. (7) There is no significant difference between post-test mean achievement scores of high achievers of experimental group and control group. (8) There is no significant difference between post-test mean attitude scores of experimental group and control group. (9) There is no significant difference between mean achievement scores of experimental group and control group and control group on retention test. (10) There is no significant difference between mean achievement scores of high achievers of experimental group and control group on retention test. (11) There is no significant difference between mean achievement scores of low achievers of Experimental group and control group on retention test. Secondary school students studying mathematics constituted the population of study. The student of 10th class of Govt. Pakistan Girls Higher School, Rawalpindi (Pakistan) was selected as a sample of the study. The pre-test post-test equivalent- group design was used for the study. The sample size consisted of forty eight students who were divided into experimental group and control group, each consisting of 24 students by equating them on their previous knowledge in mathematics, as determined through a pre-test. A treatment of planned problem-solving approach was provided to the experimental group while the control group was taught by expository strategy for a period of six weeks.