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This PhD dissertation reports design and analysis of Micro-Electro-Mechanical system (MEMS) based displacement amplification mechanism. The proposed displacement amplification mechanism has been designed and tested in three different configurations giving experimental amplification factors of 7.6, 16 and 16.14 respectively. The mechanism has been analytically modeled using kinematic and Direct Force Displacement Method. Numerical simulations are carried out by writing a code using MATLAB. Results are found in good agreement with that of the simulated results using FEM based software IntelliSuite® and experimental results substantiating the viability of this displacement amplification mechanism. Parametric analysis of the proposed mechanism evaluated the effect of different geometric parameters, hence finalizing the design geometry. The analysis predicts that length and the angle of flexure are the two key geometric parameters that significantly affect amplification factor and have direct relationship with length and inverse relationship with angle of micro-flexure. Natural frequencies and associated mode shapes of all three configurations of mechanism during free vibrations have been determined from modal analysis. Polysilicon based Multi-User MEMS Processes (PolyMUMPs) has been used for the fabrication of all micro displacement amplification mechanism prototypes. A micro mechanical probe station equipped with tungsten and acupuncture needles has been used to test the functionality of prototypes. The amplification mechanism can be incorporated with micro gripers for increasing displacement at jaw tip. Design and analysis of a variant of displacement amplification mechanism consisting of two configurations of designed amplification mechanisms having experimental amplification factor of 5.8 has been proposed. Thermal and static analysis simulations of configuration 3 of the designed displacement amplification mechanism incorporated with thermal chevron actuator and electrostatic comb drives have been carried out and results discussed in detail at the end.
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